The company Brooks needs especially clean air in the production of its Fixload. This is due to the very sensitive application area of the load interface for 300 mm wafer processing equipment in the semiconductor manufacturing.
As the wafers to be processed are exposed to the environment while loading, the clean room capability of the used energy supply system is, among others, very important here.
Solution
Tests by Brooks have shown that wearout of the igus® energy supply system was not determined even in the long-term test. A Zipper e-chain® is used in hanging installation position. At a travel distance of 290 mm, a number of 50-60 cycles per hour is attained mostly in the three-shift operation.
Other advantage: The patented zipper system enables a filling with energy cables at lightning speed and additional protection. This increases the operating safety and the holding times.
e-skin flat in use in a linear system with air bearings
Result: At as a 4-fold layer together with PVC & TPE cables from igus® ensures the reliable energy supply of an air bearing linear system.
Industry: Semiconductor manufacturing
e-chain® systems in semiconductor manufacturing
Result: The patented zipper e-chain® system meets the required travel distance of about 290 mm, cycle numbers of 50-60 cycles per hour are achieved, usually in three-shift operation.
Industry: Chip production/Semiconductor
Wafer handling
Result: With e-chain® - E6, the supply of energy for wafer handling in chip production involving acceleration rates of up to 4m/s2 and speeds of up to 6m/s is not a problem.
Industry: Medical technology
drylin® TR high helix thread nuts for laboratory equipment
Result: drylin® TR high helix thread nuts were used in laboratory equipment for handling fluids. The advantage for the cleanroom is their low coefficient of friction, higher efficiency and no lubrication is necessary, which prevents contamination.
