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cleanroom

Semiconductor Manufacturing: ISO class 1 parts

Components for every cleanroom that improve technology and reduce costs

Semiconductor manufacturers are striving for high productivity rates. The overall system effectiveness (OSE), which can be increased with solutions from igus, is correspondingly important. Our energy supply systems and cables for cleanroom applications support high manufacturing quality because they are made of high-performance polymers that are abrasion-resistant and have low gas release. They are compact, low-maintenance, easy to install and cost-effective. In addition, it has a modular design so that plant operators can make extensions at any time. Our products, which increase OSE in the semiconductor industry worldwide, are used in machines and systems for laser marking, EUV lithography and automatic optical inspection (AOI), among others.

Benefits of igus products:

  • Suitable for cleanroom and ESD
  • Low outgassing
  • Compact and light
  • Cost-effective
  • Online service life calculation
  • Maintenance-free (24 use)
  • Assembly-friendly
  • Low noise and low vibration
  • Complete system or individual components from batch size 1
  • Fast delivery
Go to Cleanroom Overview

Selected products for the display industry

e-skin flat

Flat cable guidance system

  • Suitable for cleanroom IPA ISO Class 1
  • Modular and compact design
  • Cables can be replaced in minutes
  • Optionally with co-ordinated CFCLEAN stranded structure for high dependability
e-skin flat
e-skin® soft

Two-piece corrugated tubes

  • Suitable for cleanroom according to IPA ISO Class 1
  • Two-piece, consisting of upper and lower shells
  • Fast assembly due to "zipper" opening function
  • For fast, short, unsupported applications
e-skin corrugated tubes
e-chain E6

e-chain for high dynamics

  • Cleanroom IPA ISO Class 1
  • Very quiet: 32dB(A) at 1m/s
  • Crossbars openable from both sides
  • Smooth, cable-friendly interior
  • Release pretension by turning the inner link
e-chain E6.1

Application examples for the cleanroom

e-skin flat in use in a linear system with air bearings

Industry: Chip production/Semiconductor

e-skin flat in use in a linear system with air bearings

Result: At as a 4-fold layer together with PVC & TPE cables from igus® ensures the reliable energy supply of an air bearing linear system.

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    • Cleanroom application example semiconductors

    Industry: Semiconductor manufacturing

    e-chain® systems in semiconductor manufacturing

    Result: The patented ​zipper e-chain®​ system meets the required travel distance of about 290 mm, cycle numbers of 50-60 cycles per hour are achieved, usually in three-shift operation.

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    • Cleanroom application example semiconductors

    Industry: Chip production/Semiconductor

    Wafer handling

    Result: With e-chain® - E6, the supply of energy for wafer handling in chip production involving acceleration rates of up to 4m/s2 and speeds of up to 6m/s is not a problem.

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    • Use in a laboratory unit for liquid handling.

    Industry: Medical technology

    drylin® TR high helix thread nuts for laboratory equipment

    Result: drylin® TR high helix thread nuts were used in laboratory equipment for handling fluids. The advantage for the cleanroom is their low coefficient of friction, higher efficiency and no lubrication is necessary, which prevents contamination.